OSU constructed magnetron sputter deposition system.
OSU Constructed
TANG
Magnetron Sputter Deposition System
Owen cleanroom
Dr. John Wager
CPA radio frequency sputter deposition system.
CPA
Radio Frequency Sputter Deposition
Owen Cleanroom
Dr. John Wager
This system incorporates electron beam, sputter and thermal deposition in one chamber. An 8kW, six pocket rotary egun is used primarily for deposition of refractory metals. Two 2” magnetrons are available for sputter deposition of chalcogenide materials. In addition, the system is equipped with one thermal evaporation source. The six inch substrate stage has heating to 850C, rotation, RF biasing and in situ adjustment of the source to substrate distance. The system is load locked, and the chamber base pressure is <5e-8 Torr. Process gas is Argon.
AJA International, Inc.
Orion 5
Sputter Deposition System
Owen Cleanroom
Dr. John Wager
OSU constructed radio frequency sputter deposition system.
Radio Frequency Sputter Deposition
Dearborn 300
Dr. Brady Gibbons
OSU constructed radio frequency sputter system.
Radio frequency sputter deposition
Dearborn 300
Dr. Brady Gibbons
Sputter coater.
Sputter coater
Dr. Dave Cann