Sputter Deposition

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tang

OSU constructed magnetron sputter deposition system.

OSU Constructed

TANG

Magnetron Sputter Deposition System

Owen cleanroom

Dr. John Wager

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cpa

CPA radio frequency sputter deposition system.

CPA

Radio Frequency Sputter Deposition

Owen Cleanroom

Dr. John Wager

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orion

This system incorporates electron beam, sputter and thermal deposition in one chamber.  An 8kW, six pocket rotary egun is used primarily for deposition of refractory metals.  Two 2” magnetrons are available for sputter deposition of chalcogenide materials.  In addition, the system is equipped with one thermal evaporation source.   The six inch substrate stage has heating to 850C, rotation, RF biasing and in situ adjustment of the source to substrate distance.  The system is load locked, and the chamber base pressure is <5e-8 Torr.  Process gas is Argon.

AJA International, Inc.

Orion 5

Sputter Deposition System

Owen Cleanroom

manuals(must be logged in)

Dr. John Wager

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sputter

OSU constructed radio frequency sputter deposition system.

Radio Frequency Sputter Deposition

Dearborn 300

Dr. Brady Gibbons

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sputter

OSU constructed radio frequency sputter system.

Radio frequency sputter deposition

Dearborn 300

Dr. Brady Gibbons

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sputter

Sputter coater.

Sputter coater

 

Dr. Dave Cann