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This system includes a 6000 rpm spin module with edge bead removal, a high temperature bake module, and an active cooling module along a linear track. Four inch wafers are loaded automatically from a standard cassette. Conversion for wafers up to six inch is possible. Special carrier wafers are used to accommodate small substrates. A touch screen GUI provides flexible recipe control. Three separate cartridges dispense fluids onto the substrate. The system is used for deposition of prompt inorganic condensation materials.
Site Services Inc.
Tractix
Track coating system
Owen cleanroom
Dr. Doug Keszler
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The Sonoplotter is a micro pipet printer used to print and pattern devices.
Sonoplotter
Owen cleanroom
Dr. John Wager