A joint OSU and Thermionics designed and built system. Turbo-pumped to a base pressure of 2 x 10-9 Torr, the vacuum system is load-locked and has target and substrate rotation(6-target carousel). Substrate heating via quartz lamps to 700 C, and target-substrate distance is variable. Inert gases and oxygen are introduced by an MKS mass flow controller with flow rate to 20 sccm during deposition to a level of 1 mTorr. Pressures higher than 1 mTorr can be achieved by throttling the high vacuum gate valve. The laser is a Compex 205 248 pulsed excimer laser (20 ns pulses, 1 - 10 Hz rep rate.)
Pulsed Laser Deposition
Weniger 475
Dr. Janet Tate
Neocera system. Turbo-pumped to a base pressure of 2 x 10-7 Torr, the vacuum system has target (6-target capability). Substrate heating via resistive element to 900 C, and target-substrate distance is variable. Inert gases and oxygen are introduced by an MKS mass flow controller with flow rate to 20 sccm during deposition to a level of 1 mTorr. Pressures higher than 1 mTorr can be achieved by throttling the high vacuum gate valve. The laser, shared with the Thermionics system, is a Compex 205 248 pulsed excimer laser (20 ns pulses, 1 - 10 Hz rep rate.)
Neocera Pulsed Laser Deposition
Weniger 475
Dr. Janet Tate
OSU constructed PLD system.
Pulsed Laser Deposition
Dearborn 300
Dr. Brady Gibbons