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The Batchtop system VII is a reactive ion plasma etcher used primarily for etching silicon dioxide. Other common processes include, oxygen ash and silicon nitride etch.
Plasma-Therm, Inc.
Batchtop System VII
Reactive Ion Etch
Owen Cleanroom
Dr. John Wager
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Fume hood and personal protection equipment used for performing wet etch.
Wet Chemical Hood
Owen Cleanroom
Dr. John Wager