The Batchtop system VII is a reactive ion plasma etcher used primarily for etching silicon dioxide. Other common processes include, oxygen ash and silicon nitride etch.

Plasma-Therm, Inc.
Batchtop System VII
Reactive Ion Etch
Owen Cleanroom
Dr. John Wager

Fume hood and personal protection equipment used for performing wet etch.

Wet Chemical Hood
Owen Cleanroom
Dr. John Wager